Types of Silicon Carbide Coating
Silicon carbide coatings provide an impervious barrier that protects graphite components used for MOCVD, EPI and semiconductor manufacturing from oxidation and chemicals. CGT Carbon’s PERMA KOTETM high purity silicon carbide coating protects graphite components used in MOCVD, EPI and semiconductor production environments. Coating preparation methods must be carefully chosen based on performance requirements and substrate characteristics. Below are a few popular choices: Chemical Vapor Deposition (CVD) Chemical vapor deposition (CVD) is one of the most versatile and effective means for creating thin-film coatings, producing pure, adhesive and durable films that adhere to substrates with complex geometries or structures. CVD differs from physical vapor deposition (PVD) in that its chemical reaction …