{"id":616,"date":"2024-09-07T19:50:26","date_gmt":"2024-09-07T11:50:26","guid":{"rendered":"https:\/\/2024yy.com\/?p=616"},"modified":"2024-09-07T19:50:26","modified_gmt":"2024-09-07T11:50:26","slug":"silicon-carbide-mirror","status":"publish","type":"post","link":"https:\/\/2024yy.com\/ja\/silicon-carbide-mirror\/","title":{"rendered":"\u70ad\u5316\u30b1\u30a4\u7d20\u30df\u30e9\u30fc"},"content":{"rendered":"

\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u306f\u3001\u6bd2\u6027\u304c\u306a\u304f\u3001\u71b1\u6a5f\u68b0\u7684\u5b89\u5b9a\u6027\u304c\u975e\u5e38\u306b\u9ad8\u304f\u3001\u9178\u5316\u3084\u5316\u5b66\u7684\u52a3\u5316\u306b\u5f37\u3044\u305f\u3081\u3001\u5927\u578b\u671b\u9060\u93e1\u3084\u9ad8\u901f\u30b9\u30ad\u30e3\u30f3\u30b7\u30b9\u30c6\u30e0\u306b\u7406\u60f3\u7684\u306a\u6750\u6599\u3067\u3059\u3002<\/p>\n

\u672c\u8ad6\u6587\u3067\u306f\u3001\u4f4e\u6e29PVD\u30af\u30e9\u30c3\u30c9\u306b\u3088\u308a\u6c7a\u5b9a\u8ad6\u7684\u306b\u88fd\u9020\u3055\u308c\u305f4.03m\u306eSiC\u975e\u7403\u9762\u30df\u30e9\u30fc\u3092\u7d39\u4ecb\u3059\u308b\u3002\u3053\u306e\u8ad6\u6587\u3067\u306f\u3001\u751f\u6210\uff08mm\u7cbe\u5ea6\uff09\u304b\u3089\u7814\u78e8\uff08nm\u7cbe\u5ea6\uff09\u307e\u3067\u306e\u5b9a\u91cf\u7684\u306a\u8a66\u9a13\u30c7\u30fc\u30bf\u3092\u30b7\u30fc\u30e0\u30ec\u30b9\u306b\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u512a\u308c\u305f\u8aa4\u5dee\u53ce\u675f\u3068\u5236\u5fa1\u304c\u53ef\u80fd\u306b\u306a\u308b\u3053\u3068\u3092\u8aac\u660e\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u8efd\u91cf<\/h2>\n

\u5b87\u5b99\u671b\u9060\u93e1\u306e\u30df\u30e9\u30fc\u306f\u3001\u69cb\u9020\u7684\u306b\u5065\u5168\u3067\u3042\u308b\u305f\u3081\u306b\u8efd\u91cf\u3067\u3042\u308a\u306a\u304c\u3089\u975e\u5e38\u306b\u9ad8\u3044\u91cd\u529b\u8ca0\u8377\u306b\u8010\u3048\u308b\u5fc5\u8981\u304c\u3042\u308a\u3001\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u306e\u3088\u3046\u306a\u6bd4\u525b\u6027\u306e\u9ad8\u3044\u6750\u6599\u3092\u4f7f\u7528\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002\u6b8b\u5ff5\u306a\u3053\u3068\u306b\u3001SiC\u88fd\u306e\u5927\u578b\u30df\u30e9\u30fc\u306f\u3001\u8868\u9762\u3092\u5149\u5b66\u7684\u7cbe\u5ea6\u306b\u7814\u78e8\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u305f\u3081\u3001\u88fd\u9020\u306b\u6642\u9593\u304c\u304b\u304b\u308b\uff01<\/p>\n

\u9769\u65b0\u7684\u306a\u88fd\u9020\u6280\u8853\u306f\u3001\u5927\u578b\u30df\u30e9\u30fc\u306e\u88fd\u9020\u6642\u9593\u3092\u5927\u5e45\u306b\u77ed\u7e2e\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u300280\u5e74\u4ee3\u5f8c\u534a\u304b\u3089\u3001\u7c73\u56fd\u306e\u7814\u7a76\u6240\u3067\u306f\u3001\u3088\u308a\u8fc5\u901f\u3067\u7c21\u5358\u306a\u88fd\u9020\u65b9\u6cd5\u3068\u3057\u3066\u3001\u8907\u5408SiC\u30df\u30e9\u30fc\u306e\u30db\u30c3\u30c8\u30d7\u30ec\u30b9\u6280\u8853\u3092\u6a21\u7d22\u3057\u3066\u304d\u305f\u3002\u3053\u306e\u65b9\u6cd5\u3067\u306f\u3001SiC\u7c89\u672b\u3068\u30d5\u30a7\u30ce\u30fc\u30eb\u6a39\u8102\u306e\u6df7\u5408\u7269\u3092\u30df\u30e9\u30fc\u30b3\u30a2\u306e\u4e21\u9762\u306b\u5857\u5e03\u3057\u305f\u3002\u3053\u306e\u6280\u8853\u306b\u3088\u308a\u3001\u3059\u3070\u308b\u671b\u9060\u93e1\u7528\u306e\u91cd\u3055185kg\u3001\u9762\u5bc6\u5ea6105kg\/m2\u306e1.3m\u526f\u93e1\u3092\u88fd\u4f5c\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3057\u305f\u3002\u30b3\u30fc\u30cb\u30f3\u30b0\u306e\u7b2c2\u4e16\u4ee3\u8907\u5408\u6750\u8907\u88fd\u6280\u8853\u306f\u3001\u7814\u78e8\u30a6\u30a9\u30fc\u30bf\u30fc\u30b8\u30a7\u30c3\u30c8\u3084\u305d\u306e\u4ed6\u306e\u6280\u8853\u3092\u99c6\u4f7f\u3057\u3066\u8efd\u91cf\u30b3\u30a2\u3092\u88fd\u9020\u3057\u3001\u305d\u308c\u3092\u93e1\u306e\u524d\u9762\u677f\u3068\u80cc\u9762\u677f\u306b\u63a5\u7740\u3059\u308b\u3053\u3068\u3067\u3001\u9762\u5bc6\u5ea6\u304c37kg\/m2\u3068\u4f4e\u3044\u30b5\u30f3\u30c9\u30a4\u30c3\u30c1\u69cb\u9020\u306eULE\u93e1\u3092\u5f62\u6210\u3059\u308b\u3002<\/p>\n

SiC\u306e\u53cd\u5fdc\u713c\u7d50\u306f\u3001\u9ad8\u6027\u80fdSiC\u30df\u30e9\u30fc\u3092\u4f5c\u308b\u305f\u3081\u306e\u3082\u3046\u4e00\u3064\u306e\u6709\u671b\u306a\u30a2\u30d7\u30ed\u30fc\u30c1\u3067\u3042\u308b\u3002\u3053\u308c\u306f\u3001\u30d5\u30a7\u30ce\u30fc\u30eb\u7cfb\u30d0\u30a4\u30f3\u30c0\u30fc\u3068\u6df7\u5408\u3057\u305fSiC\u7c89\u672b\u304b\u3089\u306a\u308b\u8131\u8102\u30b0\u30ea\u30fc\u30f3\u4f53\u3092\u9ad8\u6e29\u771f\u7a7a\u713c\u7d50\u7089\u3068\u7d44\u307f\u5408\u308f\u305b\u3066\u4f7f\u7528\u3057\u3001\u5b8c\u5168\u306a\u5e7e\u4f55\u5b66\u7684\u5f62\u72b6\u3001\u6700\u5c0f\u9650\u306e\u53ce\u7e2e\u3001\u512a\u308c\u305f\u6a5f\u68b0\u7684\u30fb\u5149\u5b66\u7684\u7279\u6027\u3092\u6301\u3064\u713c\u7d50\u4f53\u3092\u88fd\u9020\u3059\u308b\u3082\u306e\u3067\u3042\u308b\u3002<\/p>\n

\u30df\u30e9\u30fc\u306e\u525b\u6027\u3092\u9ad8\u3081\u308b\u306b\u306f\u3001\u8ef8\u65b9\u5411\u3068\u534a\u5f84\u65b9\u5411\u306e\u4e21\u65b9\u3067\u652f\u6301\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3002\u3053\u308c\u3092\u884c\u3046\u4e00\u3064\u306e\u65b9\u6cd5\u306f\u3001\u93e1\u306e\u80cc\u9762\u3092\u30cf\u30b9\u578b\u306b\u8a2d\u8a08\u3057\u3066\u9762\u7a4d\u6163\u6027\u30e2\u30fc\u30e1\u30f3\u30c8\u3092\u5897\u52a0\u3055\u305b\u3001\u66f2\u3052\u62b5\u6297\u3092\u5897\u52a0\u3055\u305b\u308b\u3053\u3068\u3067\u3042\u308b\u3002\u6700\u8fd1\u306e\u7814\u7a76\u3067\u306f\u3001\u5730\u4e0a\u671b\u9060\u93e1\u7528\u306b\u6700\u9069\u5316\u3055\u308c\u305f2m\u306eSiC\u8efd\u91cf\u30df\u30e9\u30fc\u3067\u3053\u306e\u65b9\u6cd5\u3092\u8a55\u4fa1\u3057\u305f\u3002\u305d\u306e\u8efd\u91cf\u5316\u306b\u3088\u308a\u3001\u540c\u30b5\u30a4\u30ba\u306e\u5f93\u6765\u306e\u30d1\u30c3\u30b7\u30d6\u30fb\u30bc\u30ed\u30c7\u30e5\u30fc\u30eb\u30fb\u30df\u30e9\u30fc\u3068\u6bd4\u8f03\u3057\u3066\u3001\u6700\u592740%\u306e\u8cea\u91cf\u524a\u6e1b\u3092\u9054\u6210\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u305f\u3002<\/p>\n

\u9ad8\u3044\u525b\u6027<\/h2>\n

\u30df\u30e9\u30fc\u306e\u91cd\u8981\u306a\u7279\u5fb4\u306e\u3072\u3068\u3064\u306b\u525b\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u3053\u306e\u7279\u6027\u306b\u3088\u308a\u3001\u9ad8\u901f\u30b9\u30ad\u30e3\u30f3\u4e2d\u306b\u5f62\u72b6\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u30ec\u30fc\u30b6\u30fc\u30b9\u30ad\u30e3\u30cb\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u304c\u6700\u5927\u9650\u306e\u6027\u80fd\u3092\u767a\u63ee\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002SiC\u306e\u512a\u308c\u305f\u525b\u6027\u306f\u3001\u5f93\u6765\u306e\u30ac\u30e9\u30b9\u30df\u30e9\u30fc\uff08\u9ad8\u5bc6\u5ea6\u3067\u8cea\u91cf\u304c\u5927\u304d\u3044\u50be\u5411\u304c\u3042\u308b\uff09\u3088\u308a\u3082\u9b45\u529b\u7684\u306a\u7279\u5fb4\u3067\u3059\u3002<\/p>\n

\u70ad\u5316\u30b1\u30a4\u7d20\u306e\u5f37\u5ea6\u3068\u525b\u6027\u306e\u7d44\u307f\u5408\u308f\u305b\u306f\u3001\u30ec\u30fc\u30b6\u30fc\u30b9\u30ad\u30e3\u30f3\u3092\u542b\u3080\u591a\u304f\u306e\u7528\u9014\u306b\u7406\u60f3\u7684\u3067\u3059\u3002\u5370\u5237\u3001\u6eb6\u63a5\u3001\u5207\u65ad\u3001\u7a74\u3042\u3051\u306a\u3069\u306e\u7528\u9014\u3067\u4f7f\u7528\u3055\u308c\u308b\u30ec\u30fc\u30b6\u30fc\u30b9\u30ad\u30e3\u30ca\u30fc\u306b\u306f\u3001\u3053\u308c\u3089\u306e\u7528\u9014\u3067\u5fc5\u8981\u3068\u3055\u308c\u308b\u9ad8\u901f\u30b9\u30ad\u30e3\u30f3\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u30df\u30e9\u30fc\u304c\u5fc5\u8981\u3067\u3059\u3002\u5f93\u6765\u306e\u30ac\u30eb\u30d0\u30ce\u30b9\u30ad\u30e3\u30f3\u30d8\u30c3\u30c9\u306f\u3001\u901a\u5e3850mm\u306e\u30d3\u30fc\u30e0\u958b\u53e3\u90e8\u3092\u5099\u3048\u3066\u304a\u308a\u3001\u3053\u306e\u901f\u5ea6\u306e\u30b9\u30ad\u30e3\u30f3\u3092\u30b5\u30dd\u30fc\u30c8\u3059\u308b\u306b\u306f\u525b\u6027\u306e\u9ad8\u3044\u30df\u30e9\u30fc\u304c\u5fc5\u8981\u3067\u3059\u3002<\/p>\n

\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u3001\u30b9\u30ad\u30e3\u30cb\u30f3\u30b0\u30fb\u30b7\u30b9\u30c6\u30e0\u304c\u4f7f\u7528\u3055\u308c\u308b\u969b\u306b\u906d\u9047\u3059\u308b\u9ad8\u901f\u3068\u9ad8\u6e29\u306e\u4e21\u65b9\u306b\u8010\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u305f\u3081\u3001\u3053\u306e\u7a2e\u306e\u30df\u30e9\u30fc\u3092\u69cb\u6210\u3059\u308b\u306e\u306b\u7406\u60f3\u7684\u306a\u6750\u6599\u3067\u3059\u3002\u3055\u3089\u306b\u3001\u70ad\u5316\u30b1\u30a4\u7d20\u306e\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027\u306b\u3088\u308a\u3001\u5e45\u5e83\u3044\u6e29\u5ea6\u7bc4\u56f2\u3067\u5b89\u5b9a\u3057\u305f\u5149\u5b66\u6027\u80fd\u3092\u78ba\u4fdd\u3057\u306a\u304c\u3089\u3001\u52b9\u679c\u7684\u306b\u71b1\u3092\u653e\u6563\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/p>\n

\u70ad\u5316\u30b1\u30a4\u7d20\u306b\u306f\u591a\u304f\u306e\u5229\u70b9\u304c\u3042\u308a\u307e\u3059\u304c\u3001\u3053\u306e\u6750\u6599\u304b\u3089\u88fd\u9020\u3055\u308c\u308b\u5927\u578b\u975e\u7403\u9762\u30df\u30e9\u30fc\u306f\u3001\u3044\u304f\u3064\u304b\u306e\u91cd\u8981\u306a\u5206\u91ce\u306b\u304a\u3051\u308b\u8ab2\u984c\u306e\u305f\u3081\u306b\u88fd\u9020\u304c\u56f0\u96e3\u3067\u3057\u305f\u3002\u4e3b\u306a\u8ab2\u984c\u3068\u3057\u3066\u306f\u3001\u30df\u30e9\u30fc\u30d6\u30e9\u30f3\u30af\u306e\u6e96\u5099\u3001\u975e\u7403\u9762\u306e\u88fd\u9020\u3068\u8a66\u9a13\u306e\u554f\u984c\u3001\u8a66\u9a13\u624b\u9806\u306e\u5fe0\u5b9f\u5ea6\/\u7cbe\u5ea6\u3001\u30af\u30e9\u30c3\u30c9\u30d7\u30ed\u30bb\u30b9\u306e\u5fdc\u529b\/\u5bc6\u5ea6\u3001\u30af\u30e9\u30c3\u30c9\u30d7\u30ed\u30bb\u30b9\u306e\u5bc6\u5ea6\u3001\u6c7a\u5b9a\u8ad6\u7684\u8a66\u9a13\u624b\u9806\u306b\u5fc5\u8981\u306a\u30c0\u30a4\u30ca\u30df\u30c3\u30af\u30ec\u30f3\u30b8\u306b\u95a2\u9023\u3059\u308b\u30d7\u30ea\u30f3\u30c8\u30b9\u30eb\u30fc\u52b9\u679c\u306e\u554f\u984c\u306a\u3069\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n

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\u3053\u306e\u30a2\u30d7\u30ed\u30fc\u30c1\u306b\u3088\u308a\u3001RMS\u8aa4\u5dee10-15nm\u3001MSF\u8aa4\u5dee5-6nm\u3068\u3044\u3046\u512a\u308c\u305fFSF\uff08Figure-Sharpness\uff09\u4ed5\u69d8\u306e4m\u975e\u7403\u9762\u70ad\u5316\u30b1\u30a4\u7d20\u30df\u30e9\u30fc\u306e\u88fd\u9020\u304c\u53ef\u80fd\u306b\u306a\u3063\u305f\u3002\u3055\u3089\u306b\u3001\u3053\u306e\u30df\u30e9\u30fc\u306e\u4e8c\u4e57\u5e73\u5747\u5e73\u65b9\u6839\u7c97\u3055\u306f\u308f\u305a\u304b0.094nm\u3067\u3042\u308b\u3002<\/p>\n

\u9ad8\u3044\u71b1\u4f1d\u5c0e\u6027<\/h2>\n

\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u306f\u3001\u5f37\u529b\u306a\u6a5f\u68b0\u7684\u7279\u6027\u3068\u71b1\u7684\u7279\u6027\u3092\u6301\u3064\u512a\u308c\u305f\u591a\u7d50\u6676\u6750\u6599\u3067\u3042\u308a\u3001\u904e\u9177\u306a\u74b0\u5883\u3067\u4f7f\u7528\u3055\u308c\u308b\u5149\u5b66\u30df\u30e9\u30fc\u306e\u57fa\u677f\u6750\u6599\u3068\u3057\u3066\u6700\u9069\u3067\u3059\u3002\u5316\u5b66\u7684\u52a3\u5316\u306b\u5f37\u304f\u3001\u81a8\u5f35\u4fc2\u6570\u304c\u4f4e\u3044\u305f\u3081\u3001\u3053\u306e\u5b89\u5b9a\u3057\u305f\u57fa\u677f\u306f\u3001\u74b0\u5883\u6761\u4ef6\u304c\u5909\u5316\u3057\u3066\u3082\u5f62\u72b6\u304c\u5909\u5316\u3057\u307e\u305b\u3093\u3002\u3053\u308c\u306f\u3001\u5927\u578b\u671b\u9060\u93e1\u304c\u89b3\u6e2c\u306e\u305f\u3081\u306b\u7570\u306a\u308b\u4f4d\u7f6e\u3092\u3068\u3089\u3048\u308b\u305f\u3081\u306b\u79fb\u52d5\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u5834\u5408\u306b\u7279\u306b\u91cd\u8981\u306a\u3053\u3068\u3067\u3059\u3002<\/p>\n

SiC\u306f\u30ac\u30e9\u30b9\u3084\u30ac\u30e9\u30b9\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3068\u306f\u7570\u306a\u308a\u3001\u8907\u96d1\u306a\u4e09\u6b21\u5143\u5f62\u72b6\u306b\u6a5f\u68b0\u52a0\u5de5\u3057\u3001\u5149\u5b66\u6a5f\u68b0\u90e8\u54c1\u3092\u5bb9\u6613\u306b\u7d44\u307f\u7acb\u3066\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u305f\u3081\u3001\u6700\u5927\u53e3\u5f84\u306e\u8efd\u91cf\u671b\u9060\u93e1\u306e\u8a2d\u8a08\u304c\u53ef\u80fd\u3067\u3059\u3002\u3055\u3089\u306b\u3001\u305d\u306e\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027\u3068\u71b1\u81a8\u5f35\u80fd\u529b\u306b\u3088\u308a\u3001\u52d5\u7684\u6027\u80fd\u306b\u5f71\u97ff\u3092\u4e0e\u3048\u308b\u3053\u3068\u306a\u304f\u3001\u9ad8\u901f\u30ec\u30fc\u30b6\u30fc\u30b9\u30ad\u30e3\u30cb\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306b\u304a\u3044\u3066\u30d9\u30ea\u30ea\u30a6\u30e0\u306b\u53d6\u3063\u3066\u4ee3\u308f\u308b\u3053\u3068\u306b\u6210\u529f\u3057\u3066\u3044\u308b\u3002<\/p>\n

\u5927\u53e3\u5f84SiC\u30df\u30e9\u30fc\u306e\u88fd\u9020\u306f\u3001\u308d\u3046\u4ed8\u3051\u307e\u305f\u306f\u62e1\u6563\u6eb6\u63a5\u6280\u8853\u3092\u4f7f\u7528\u3057\u3066\u63a5\u5408\u3059\u308b\u524d\u306b\u3001\u69cb\u9020\u7684\u306b\u8907\u6570\u306e\u30d7\u30ea\u30d5\u30a9\u30fc\u30e0\u306b\u5206\u5272\u3059\u308b\u3068\u3044\u3046\u8a2d\u8a08\u8981\u4ef6\u306e\u305f\u3081\u3001\u304b\u306a\u308a\u306e\u56f0\u96e3\u3092\u4f34\u3046\u3002\u63a5\u5408\u9762\u3068\u6bcd\u6750\u3068\u306e\u4e0d\u4e00\u81f4\u306b\u3088\u308a\u3001\u30df\u30e9\u30fc\u306b\u3055\u3089\u306a\u308b\u5fdc\u529b\u304c\u52a0\u308f\u308a\u3001\u88fd\u9020\u65b9\u6cd5\u306f\u7cbe\u5bc6\u306a\u7cbe\u5ea6\u3084\u69cb\u9020\u7684\u5b8c\u5168\u6027\u3092\u5fc5\u8981\u3068\u3057\u306a\u3044\u7528\u9014\u306b\u3057\u304b\u5229\u7528\u3067\u304d\u306a\u3044\u3002<\/p>\n

\u30e1\u30eb\u30bb\u30f3\u30d6\u30fc\u30b9\u30c6\u30c3\u30af\u306f\u30014.03m\u306eSiC\u975e\u7403\u9762\u30df\u30e9\u30fc\u30d6\u30e9\u30f3\u30af\u3092\u4e00\u4f53\u3067\u91cf\u7523\u3067\u304d\u308b\u4ee3\u66ff\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3092\u958b\u767a\u3057\u305f\u3002\u3053\u306e\u65b0\u3057\u3044\u88fd\u9020\u6280\u8853\u306f\u3001\u6c34\u6eb6\u6027\u5e38\u6e29\u6d88\u5931\u92f3\u578b\u3092\u7528\u3044\u305f\u30b2\u30eb\u92f3\u9020\u6280\u8853\u306b\u4f9d\u5b58\u3057\u3001\u30af\u30e9\u30c3\u30af\u306e\u306a\u3044\u4e7e\u71e5\u306b\u7d9a\u3044\u3066\u3001\u8efd\u91cf\u30b0\u30ea\u30fc\u30f3\u30dc\u30c7\u30a3\u306e\u30bb\u30b0\u30e1\u30f3\u30c8\u30921\u3064\u306e\u30e2\u30ce\u30ea\u30b7\u30c3\u30af\u30d6\u30e9\u30f3\u30af\u306b\u7e2b\u3044\u5408\u308f\u305b\u308b\u53cd\u5fdc\u63a5\u5408\u624b\u9806\u3092\u63a1\u7528\u3057\u3066\u3044\u308b\u3002\u3053\u306e\u9769\u65b0\u7684\u306a\u30a2\u30d7\u30ed\u30fc\u30c1\u306f\u3001\u65e2\u5b58\u306e\u30bb\u30e9\u30df\u30c3\u30af\u6210\u5f62\u6280\u8853\u3084\u713c\u7d50\u6280\u8853\u306b\u4f34\u3046\u5236\u7d04\u3092\u514b\u670d\u3057\u3001\u3088\u308a\u5927\u578b\u3067\u7d71\u5408\u3055\u308c\u305f\u5149\u5b66\u8a2d\u8a08\u3078\u306e\u9053\u3092\u958b\u304f\u3082\u306e\u3067\u3042\u308b\u3002<\/p>\n

\u3053\u306e\u88fd\u54c1\u306f\u3001\u30d6\u30e9\u30f3\u30af\u306b\u6210\u5f62\u3055\u308c\u305f\u5f8c\u3001\u8ecc\u9053\u4e0a\u306e\u6761\u4ef6\u306b\u5bfe\u3059\u308b\u9069\u5408\u6027\u3092\u78ba\u8a8d\u3059\u308b\u305f\u3081\u306b\u53b3\u3057\u3044\u8a66\u9a13\u3092\u53d7\u3051\u307e\u3059\u3002\u4e0b\u306e\u30b0\u30e9\u30d5\u304b\u3089\u308f\u304b\u308b\u3088\u3046\u306b\u30014.03m\u306eSiC\u975e\u7403\u9762\u30bb\u30e9\u30df\u30c3\u30af\u30df\u30e9\u30fc\u30d6\u30e9\u30f3\u30af\u306f\u3001\u30b8\u30f3\u30d0\u30eb\u3068\u771f\u7a7a\u5727\u529b\u306e\u4e21\u65b9\u304b\u3089\u306e\u8907\u5408\u8377\u91cd\u306b\u5bfe\u3057\u3066\u3001\u5353\u8d8a\u3057\u305f\u5b89\u5b9a\u6027\u3092\u793a\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n

\u3053\u306e\u30df\u30e9\u30fc\u306f\u3001\u512a\u308c\u305f\u8ef8\u65b9\u5411\u304a\u3088\u3073\u534a\u5f84\u65b9\u5411\u306e\u5b89\u5b9a\u6027\u3092\u793a\u3057\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30ec\u30fc\u30b6\u30fc\uff08HEL\uff09\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u9069\u3057\u3066\u3044\u308b\u3053\u3068\u3092\u3055\u3089\u306b\u8a3c\u660e\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u6027\u80fd\u306f\u3001\u5b87\u5b99\u7a7a\u9593\u7279\u6709\u306e\u30b9\u30c8\u30ec\u30b9\u306b\u8010\u3048\u308b\u3088\u3046\u306b\u6700\u9069\u5316\u3055\u308c\u305f\u5805\u7262\u306a\u70ad\u5316\u30b1\u30a4\u7d20\u69cb\u9020\u306b\u76f4\u63a5\u8d77\u56e0\u3057\u3066\u3044\u308b\u3002<\/p>\n

\u826f\u597d\u306a\u5149\u5b66\u7279\u6027<\/h2>\n

\u70ad\u5316\u30b1\u30a4\u7d20\u306e\u512a\u308c\u305f\u5f37\u5ea6\u3001\u525b\u6027\u3001\u71b1\u4f1d\u5c0e\u6027\u306f\u3001\u5927\u578b\u671b\u9060\u93e1\u306e\u93e1\u306b\u7406\u60f3\u7684\u306a\u6750\u6599\u3067\u3042\u308b\u306b\u3082\u304b\u304b\u308f\u3089\u305a\u3001\u305d\u306e\u8907\u96d1\u306a\u8868\u9762\u306e\u52a0\u5de5\u306b\u306f\u6570\u30f6\u6708\u304b\u3089\u6570\u5e74\u3092\u8981\u3059\u308b\u3053\u3068\u304c\u591a\u3044\u3002\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u3092\u30b9\u30d4\u30fc\u30c9\u30a2\u30c3\u30d7\u3059\u308b\u305f\u3081\u3001\u79d1\u5b66\u8005\u305f\u3061\u306f\u3001\u30c7\u30b8\u30bf\u30eb\u30fb\u30e2\u30c7\u30eb\u3092\u4f7f\u7528\u3057\u3066\u6750\u6599\u3092\u5c64\u3054\u3068\u306b\u7269\u7406\u7684\u306a\u7269\u4f53\u306b\u7a4d\u5c64\u3059\u308b\u7a4d\u5c64\u9020\u5f62\u6280\u8853\u3092\u8003\u3048\u51fa\u3057\u305f\u3002\u3053\u306e\u6280\u8853\u306f\u3001\u5f93\u6765\u306e\u30bb\u30e9\u30df\u30c3\u30af\u6210\u5f62\u3084\u713c\u7d50\u30d7\u30ed\u30bb\u30b9\u3088\u308a\u3082\u30d1\u30fc\u30bd\u30ca\u30e9\u30a4\u30bc\u30fc\u30b7\u30e7\u30f3\u3001\u8fc5\u901f\u6027\u3001\u7d4c\u6e08\u6027\u3092\u63d0\u4f9b\u3059\u308b\u3002<\/p>\n

\u30df\u30e9\u30fc\u306f\u671b\u9060\u93e1\u306e\u5149\u5b66\u6027\u80fd\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002\u9ad8\u51fa\u529b\u30ec\u30fc\u30b6\u30fc\u3067\u6700\u9069\u306a\u7d50\u679c\u3092\u5f97\u308b\u305f\u3081\u306b\u306f\u3001\u30df\u30e9\u30fc\u306f\u7279\u306b\u9ad8\u51fa\u529b\u30ec\u30fc\u30b6\u30fc\u3067\u6b6a\u307f\u304c\u751f\u3058\u306a\u3044\u3088\u3046\u3001\u512a\u308c\u305f\u5f62\u72b6\u5b89\u5b9a\u6027\u3068\u8868\u9762\u54c1\u8cea\u304c\u6c42\u3081\u3089\u308c\u307e\u3059\u3002\u3053\u308c\u3092\u5b9f\u73fe\u3059\u308b\u305f\u3081\u306b\u3001\u70ad\u5316\u30b1\u30a4\u7d20\u306f\u6eb6\u878d\u30b7\u30ea\u30ab\u3084\u30d9\u30ea\u30ea\u30a6\u30e0\u306a\u3069\u306e\u30bb\u30e9\u30df\u30c3\u30af\u3088\u308a\u3082\u71b1\u81a8\u5f35\u7387\u304c\u4f4e\u304f\u3001\u6975\u7aef\u306a\u9ad8\u6e29\u306b\u306a\u308a\u3084\u3059\u3044\u5b87\u5b99\u74b0\u5883\u3067\u306f\u7406\u60f3\u7684\u306a\u6750\u6599\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n

SiC\u30df\u30e9\u30fc\u306f\u512a\u308c\u305f\u69cb\u9020\u7279\u6027\u3092\u6301\u3064\u3060\u3051\u3067\u306a\u304f\u3001\u5353\u8d8a\u3057\u305f\u5149\u5b66\u7279\u6027\u3082\u6301\u3063\u3066\u3044\u307e\u3059\u3002\u305d\u306e\u5f3e\u6027\u7279\u6027\u306f\u30ac\u30e9\u30b9\u306b\u5339\u6575\u3059\u308b\u4e00\u65b9\u3001\u3088\u308a\u5909\u5f62\u3057\u306b\u304f\u3044\u305f\u3081\u3001\u8a2d\u8a08\u8005\u306f\u671b\u9060\u93e1\u30b7\u30b9\u30c6\u30e0\u306e\u91cd\u91cf\u3068\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3059\u308b\u8584\u578b\u30df\u30e9\u30fc\u3092\u4f5c\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/p>\n

\u3053\u308c\u3089\u306e\u7279\u8cea\u3092\u6700\u5927\u9650\u306b\u6d3b\u7528\u3059\u308b\u305f\u3081\u306b\u306f\u3001\u5149\u5b66\u90e8\u54c1\u30e1\u30fc\u30ab\u30fc\u304c\u5927\u578b\u5149\u5b66\u30b7\u30b9\u30c6\u30e0\u306b\u7279\u6709\u306e\u6a5f\u68b0\u7684\u8981\u4ef6\u3092\u8a8d\u8b58\u3059\u308b\u3053\u3068\u304c\u6975\u3081\u3066\u91cd\u8981\u3067\u3059\u3002\u4f8b\u3048\u3070\u3001\u30ac\u30eb\u30d0\u30ce\u30df\u30e9\u30fc\u306e\u8a2d\u8a08\u8005\u306f\u3001\u3053\u308c\u3089\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u304c\u30b7\u30b9\u30c6\u30e0\u5168\u4f53\u306e\u5171\u632f\u306b\u3069\u306e\u3088\u3046\u306b\u5f71\u97ff\u3059\u308b\u304b\u306b\u7279\u5225\u306a\u6ce8\u610f\u3092\u6255\u3044\u3001\u30df\u30e9\u30fc\u81ea\u4f53\u306e\u5f3e\u6027\u7279\u6027\u3060\u3051\u3067\u306a\u304f\u3001\u5171\u632f\u8a66\u9a13\u306b\u95a2\u4e0e\u3059\u308b\u3059\u3079\u3066\u306e\u90e8\u54c1\u306e\u5f62\u72b6\u306e\u4e21\u65b9\u3092\u8003\u616e\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n

\u30a2\u30d0\u30f3\u30c6\u30a3\u30a8\u306e\u9769\u65b0\u7684\u306a\u88fd\u9020\u5de5\u7a0b\u306f\u3001\u671b\u9060\u93e1\u3001\u30b9\u30ad\u30e3\u30cb\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u3001\u5b87\u5b99\u30df\u30c3\u30b7\u30e7\u30f3\u306e\u7cbe\u5bc6\u306a\u8981\u4ef6\u3092\u6e80\u305f\u3059\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3055\u308c\u305f\u70ad\u5316\u30b1\u30a4\u7d20\u30df\u30e9\u30fc\u3092\u88fd\u9020\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u30a2\u30d0\u30f3\u30c6\u30a3\u30a8\u306e\u88fd\u9020\u65b9\u6cd5\u306f\u3001\u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5\u3068\u6700\u5148\u7aef\u306e\u8a08\u6e2c\u6a5f\u5668\u3092\u6d3b\u7528\u3057\u3001\u6700\u9ad8\u54c1\u8cea\u306e\u30df\u30e9\u30fc\u3060\u3051\u3092\u78ba\u5b9f\u306b\u88fd\u9020\u3057\u307e\u3059\u3002\u30a2\u30d0\u30f3\u30c6\u30a3\u30a8\u306f\u3001\u69d8\u3005\u306a\u30b5\u30a4\u30ba\u3068\u5f62\u72b6\u306e\u30df\u30e9\u30fc\u3092\u88fd\u9020\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u3055\u3089\u306b\u3001\u3053\u308c\u3089\u306e\u8981\u4ef6\u3092\u6e80\u305f\u3059\u305f\u3081\u306b\u5149\u5b66\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u306e\u69d8\u3005\u306a\u30aa\u30d7\u30b7\u30e7\u30f3\u3092\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002<\/p>","protected":false},"excerpt":{"rendered":"

Silicon carbide (SiC) is an ideal material for larger telescopes and high-speed scanning systems due to its non-toxicity, exceptional thermomechanical stability and resistance against oxidation and chemical degradation. This paper presents a deterministically manufactured 4.03 m SiC aspheric mirror with low-temperature PVD cladding. It illustrates how quantitative test data from generation (mm precision) to polishing (nm precision) can be seamlessly combined to allow for excellent error convergence and control. Lightweight Space telescope mirrors must withstand extremely high gravitational loads while remaining light to remain structurally sound, which requires using materials with high specific stiffness such as silicon carbide (SiC). Unfortunately, large mirrors made from SiC can be time-consuming to produce …<\/p>\n

\u70ad\u5316\u30b1\u30a4\u7d20\u30df\u30e9\u30fc<\/span> \u3082\u3063\u3068\u8aad\u3080 \"<\/a><\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"","footnotes":""},"categories":[2],"tags":[],"class_list":["post-616","post","type-post","status-publish","format-standard","hentry","category-product-related"],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/posts\/616","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/comments?post=616"}],"version-history":[{"count":1,"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/posts\/616\/revisions"}],"predecessor-version":[{"id":617,"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/posts\/616\/revisions\/617"}],"wp:attachment":[{"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/media?parent=616"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/categories?post=616"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/2024yy.com\/ja\/wp-json\/wp\/v2\/tags?post=616"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}